Eui-Hyeok Yang

Current Research: Advanced Quantum Materials and Sensing Explore 2D dilute magnetic semiconductors via an in situ substitutional doping of metal atoms into the transition metal lattice sites in TMD monolayers, probe ferromagnetism at room temperature, and study electron transport in 2D materials. This new class of materials finds critical applications, including spintronic memories and detectors.

Past Innovations: MEMS Technologies for Adaptive Optics Developed MEMS-based adaptive optics for ultra-large space telescopes at NASA/JPL. These projects were funded by NASA, JPL, and the National Reconnaissance Office (NRO).

Appointments:
Professor (Tenured), Mechanical Eng., Stevens Inst. Technology 2014 – Current
Visiting Professor, Physics Dept., Kyunghee University 2023
Visiting Scholar, Electrical Eng., Columbia University 2014
Associate Professor (Tenured), Mechanical Eng., Stevens Inst. Technology 2012 – 2014
Associate Professor (Tenure-Track), Mechanical Eng., Stevens Inst. Technology 2006 – 2012
Director, Micro Device Laboratory, Stevens Inst. Technology 2008 – 2020
Senior Member of Eng. Staff, NASA Jet Propulsion Laboratory 2003 – 2006
Research Advisor, National Research Council 2002 – 2006
Technical Monitor (NASA SBIR), NASA Jet Propulsion Laboratory 2001 – 2006
Task Manager, NASA Jet Propulsion Laboratory 2001 – 2006
Member of Eng. Staff, NASA Jet Propulsion Laboratory 2000 – 2002

Professional Activities:
National Academy of Inventors (NAI) Fellows Advisory Committee, National Academy of Inventors (2019-current)
IEEE Sensors Council Technical Achievement Award Selection Committee (2021)
Associate Editor-in-Chief (AEiC), IEEE Sensors Reviews (2024 - current)
Editor-in-Chief, Synthesis, Modeling and Characterization of Two-Dimensional Materials and Their Heterostructures, Micro and Nano Technologies, Elsevier, 2020
Editorial Board Member
Scientific Reports (2016-current)
Elsevier NANOSO (2017-2019)
Associate Editor
IEEE Sensors Journal (2008-current)
Micromachines (2019-2024)
ASME Journal of Electrochemical Energy Conversion and Storage (2018-2021)
Nanoscience and Nanotechnology Letters (2010-2016)
Lead Guest Editor, NANOSO, Special Issue on 1D and 2D Materials – Modeling, Fabrication and Characterization, published in Dec 2017
Guest Editor, Nanoscience and Nanotechnology Letters, Special Issue on Nanoscale Materials, Structures and Devices for Sensors and Systems Applications, published in July 2010
Division Chair, ASME MEMS Division 2012-2013
Division Vice-Chair, ASME MEMS Division 2011-2012
Member of Executive Committee, ASME MEMS Division 2009-2014
Committee Chair, Program and Editorial Committee, ASME MEMS Division, 2009, 2010, 2011
Standing Member, Executive Committee, ASME MEMS Division 2009, 2010
Track Chair, Micro and Nano Systems Track, ASME International Mechanical Engineering Congress and Exposition (IMECE) 2009, 2010, 2011
(Nano and Micro Systems at the ASME International Mechanical Engineering Congress and Exposition consisted of approximately 50 sessions and over 250 presentations related to advances in Nano and Micro Systems.)
Track Co-Chair, Micro and Nano Systems Track in IMECE 2012
Track Co-Chair; Nanoengineering for Biology and Medicine Track in IMECE 2011
Committee Member, ASME Society-Wide Micro/Nano Technology Forum, 2008-2012
Technical Program Committee
SPIE Defense and Security Symposium (MEMS and Nanotechnology), Orlando, Florida, USA, March 2008-2011
IEEE Sensors Conference, Atlanta, Georgia, USA, Oct. 2007; Daegu, Korea, Oct. 2006; Irvine, CA, Oct. 2005; Vienna, Austria, Oct. 2004
SPIE MEMS/MOEMS Components and Their Applications Conference, San Jose, California, USA, January 2003-2005
Workshop/Symposia Organizer
Metro Area MEMS/NEMS workshop, July 2010
Micro and Nano Devices Symposium, Miniaturization for Space, ASME International Mechanical Engineering Congress and Exposition, Vancouver, Canada, Nov. 2010
Micro and Nano Devices Symposium, ASME International Mechanical Engineering Congress and Exposition, Orlando, FL Nov. 2006-2009
Metro Area MEMS/NEMS workshop, July 2007
Co-Organizer, Micro and Nano Devices Topic, MEMS Division, ASME International Mechanical Engineering Congress and Exposition, Orlando, FL, Nov. 2005
Session Chair and Organizer
SPIE Defense and Security Symposium (MEMS and Nanotechnology), Orlando, Florida, USA, March 2007-2011
ASME International Mechanical Engineering Congress and Exposition, Orlando, FL, Nov. 2009; Boston, MA, Nov. 2008; Seattle, Washington, Nov. 2007; Chicago, IL, Nov. 2006; Orlando, FL, Nov. 2005
IEEE Sensors Conference, Daegu, Korea, Oct. 2006; Irvine, CA, Oct. 2005
SPIE MEMS/MOEMS Components and Their Applications Conference, San Jose, California, USA, Jan. 2004-2005
Advisory Board, Lab-on-a-Chip & Microarray World Congress
Reviewed MEMS mirror array technologies developed for NASA’s Multi-Object Spectrometer project for the James Webb Space Telescope.
Developed and led the MEMS-based actuator thrust supported by the National Reconnaissance Office, NASA Code R Enabling Technology Program, and DARPA to develop MEMS deformable mirrors, microvalves, and microactuators at NASA/JPL.
Reviewer
Journals (Alphabetical order) - ACS NANO, Accounts of Chemical Research, ACS Applied Materials and Interfaces, ACS Photonics, Advanced Materials, Advanced Functional Materials, Analytical Chemistry, Analyst, Applied Physics Letters, ASME Journal of Dynamic Systems, Measurement and Control, BioNanoScience, Carbon, Chemistry of Materials, Electroanalysis, IEEE Sensors Journal, IEEE/ASME Journal of Microelectromechanical Systems, IEEE/ASME Transactions on Mechatronics, IEEE EDS Electron Device Letters, IEEE Trans. Control Systems Technology, IEEE Trans. Electron Devices, IEEE Trans. Nanotechnology, International Journal of Optomechatronics, JACS, Journal of Abrasive Technology, Journal of Applied Physics, Journal of Colloidal and Interfacial Science, Journal of Composite Materials, Journal of Intelligent Material Systems and Structures, Journal of Material Science, Journal of Materials Chemistry C, Journal of Magnetism and Magnetic Materials,Journal of Mechanical Science and Technology, Journal of Micromechanics and Microengineering, Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3), Journal of Nanoengineering and Nanosystems, Journal of Optics A: Pure and Applied Optics, Journal of Physics: Condensed Matter, Journal of Physics D: Applied Physics, Journal of Physical Chemistry, Journal of Sensors and Materials, Journal of Thermal Engineering,The Journal of the Electrochemical Society, Journal of the American Chemical Society, Lab Chip, Langmuir, Materials, Material Express, Materials Today, Materials, Chemistry and Physics, Measurement Science and Technology, Micro and Nano Systems Letters, Microelectronic Engineering, Microfluidics and Nanofluidics, Micromachines,Micromechatronics, Nano Letters, Nano Research, Nanoscale, Nanoscale Research Letters, Nanoscience and Nanotechnology Letters, Nanotechnology, Nature Communication, Optics Communications, Physical Chemistry Chemical Physics, Polymer Chemistry, RSC Advances, Science Advances, Scientific Reports, Sensors, Sensors and Actuators A, Sensors and Actuators B, Sensors and Materials, Small, Smart Mater. Struct., Thin Solid Films, 2D Materials
Proposals - NSF DMR EPM, Israeli Ministry of Science, Technology and Space, Memorial Sloan Kettering Cancer Center, NSF DMR, February ACS Petroleum Research Fund, NSF CAREER, NSF EPSCoR, DOE EPSCoR, NTU of the Tier 1 Grant, NSF SBIR Panel, NSF Nanomanufacturing Panel, NSF Scalable Nanomanufacturing Panel, NSF Major Research Instruments Panel, NSF International Research Experience for Students (IRES) Program, Army Research Office, National Project Competition in Antarctic Science (Chile), NSF CAREER Panel, Micro and Nano Systems (IHCS), Center for Functional Nanomaterials, NSF CAREER Panel, Chemical and Biological Separations, Cooperative Grants Program (CGP)-A of the U.S. Civilian Research and Development Foundation (CRDF), NASA SBIR Phase I and II, JPL Research and Technology Development, Ireland Science Foundation

Master of Engineering, Honoris Causa (2023), Stevens Inst. Technology
Distinguished Lecturer (2023-2025), IEEE Sensors Council
Technical Achievement Award (2020), IEEE Sensors Council
For outstanding contributions and leadership in the field of nanotechnology-based sensors, for his high-impact research, and for his commitment to shaping the scientists, engineers, and educators of tomorrow
Fellow of the American Society of Mechanical Engineers (2019)
Recognized for significant contributions in multi-disciplinary research areas through his research and entrepreneurial activities
Fellow of the National Academy of Inventors (2018)
Recognized for demonstrating a highly prolific spirit of innovation in creating or facilitating outstanding inventions that have made a tangible impact on the quality of life, economic development, and welfare of society.
Jess H. Davis Memorial Award for Research Excellence (2018), Stevens Inst. Technology
Recognized for excellence in leading 2D materials research based on the paper published as the Cover Article in Advanced Materials
Outstanding Reviewer Award (2016), Nanotechnology
Recognized for the high quality and timeliness of reviews
Decadal Leadership Recognition (2014), ASME MEMS Division
Recognized for his excellence in leading the division in efforts to foster collaboration and maintain a high level of creativity in the field
NASA ICB Space Act Award (2005), NASA JPL
Recognized for developing piezoelectric microvalves for high-pressure applications
Lew Allen Award for Excellence (2004), NASA JPL
Recognized for his excellence in advancing the use of Micro Electro Mechanical Systems–based actuators for space applications. Developed several significant areas of research in MEMS-based actuators for space applications, utilizing MEMS actuators for the development of high-pressure, low leak-rate microvalves, continuous membrane deformable mirrors and inchworm devices for segmented mirror assembly and control for large aperture, space-based telescopes
Level C Award (2003), NASA JPL
Recognized for technical accomplishments on 1) demonstrating a piezoelectric microvalve, 2) leading the design of the MEMS inchworm actuator, 3) leading two postdoctoral researchers and one technical staff.
NASA ICB Space Act Award (2003), NASA JPL
Recognized for developing a wafer-level membrane transfer technique
Level B Bonus Award (2001), NASA JPL
Recognized for technical accomplishments in developing MEMS-based deformable mirror technology using thin-film PZT actuators and electrostatic actuators
Class 1 NASA Tech Brief Awards (2001-2008), NASA JPL
Recognized for inventions on several microactuator-based components for space applications (28 awards).
JSPS Postdoctoral Fellowship (1996-1998), Japan Society for the Promotion of Science (The University of Tokyo, Japan)
Summa Cum Laude Honor (1990), Ajou University, Korea

Total: ~ $11M (PI)
Currently, active projects denoted by *

*US Army- DEVCOM, Quantum & Artificial Intelligence Technologies for Next Generation Armament Systems, co-PI, ACC-New Jersey under Contract No. W15QKN-18-D-0040 (2023-2028)
US Army- DEVCOM, Graphene Rings for Atomically Thin Matter-Wave Interferometer, PI, HQ003419D0003; DO HQ003421F0515 (2021~ 2023)
US Army- DEVCOM: Advanced Materials for Quantum Sensing (under Quantum Technologies for Armament Systems), co-PI, under #: W15QKN-18-D-0040 (2021~ 2023)
US Army, Material Development and Nanofabrication of Graphene Structures, PI (2020-2021)
US Army, Sensor Development for Precision Munitions, PI (2019-2020)
NSF, I-Corps™: Flexible and Stretchy Electronic Skin Sensor, PI (2019-2020) (IIP-1933645)
SPRINT/Quantum Seedling Grant, Integration of 2D Crystals toward Photonic Computing (2019)
ACS PRF, Rejuvenating Conjugated Polymer Membranes for Oily Water Treatment: PI, (with Choi) (2016~2019) (PRF# 56455-ND5)
NSF, MRI: Acquisition of Cryogen-free Low-temperature Scanning-probe Spectroscopy System for Nanophotonic and Nanoelectronic Device Characterization, co-PI (PI: Strauf) (2015~2017) (ECCS-1531237)
AFOSR: Wavelength-Tunable IR Detector based on Suspended Bilayer Graphene Micro Ribbons: PI, (with Strauf) (2012~2015) (FA9550-12-1-0326)
NSF, Tunable Wetting on Smart Polymers for Ultra-Low Voltage Digital Microfluidics, PI, (with Choi) (2012~2015) (ECCS-1202269)
NSF, Bandgap-Tunable Graphene Nanoribbons for High Speed, Ultra-Wide-Band Photodetectors, PI (with Strauf), (2011~2015) (ECCS-1104870)
NSF, NUE: Nanotechnology EXposure for Undergraduate Students (NUE-NEXUS), PI (with Fisher, Choi, Besser, and Sheppard), (2011~2015) (EEC-1138244)
AFOSR, DURIP: Instrumentation for Atomic Lattice Imaging of Graphitic Materials for Advanced Nanoelectronics and Nanosensing Systems, PI (2011~2013) (FA9550-11-1-0272)
NSF, MRI: Acquisition of a Nanoimprint Lithography System for Nanoscience Research and Education based on Low-Dimensional Materials, PI (with Choi, Strauf, Cappelleri ‘and Besser), (2011~2012) (ECCS-1040007)
NASA GSFC IRAD, Ultra-Low Leak Rate Piezoelectrically Actuated Microvalves for Controlled Sampling by Mass Spectrometers Stevens PI, (PI: Manuel Balvin, NASA Goddard Space Flight Center)(2010~2011)
NASA GSFC IRAD, Graphene as Transparent Conductive Electrodes for High-Density Focal Plane Assemblies Stevens PI, (PI: Mary Li, NASA Goddard Space Flight Center)(2010~2011)
US Army ARDEC, Carbon-based Electron Wave Interferometer for Chip-Scale Gyroscopes for Guided, Gun Launched Munitions and Missiles, PI (with Strauf and Search) (2009~2011) (W15QKN-05-D-0011)
US Army ARDEC, MicroSystems for Energy Harvesting, Co-PI (PI: Manoochehri) (2010~2011).
NSF, MRI: Acquisition of an Inductively Coupled Plasma (ICP) Etching System for Nano/Micro Device Fabrication: Co-PI (PI: Yong Shi) (2008~2010) (ECCS-0821606)
NASA SBIR Phase II, Micromachined Piezoelectric Multi-layer Actuators for Cryogenic Adaptive Optics: Stevens PI, (PI: Xiaoning Jiang, TRS Technologies) (2009~2011)
AFOSR, Ultra-High-Speed Single-Electron Memory Devices based on Carbon Nanotube Quantum Dots: PI, (2008~2011) (FA9550-08-1-0134)
NASA SBIR Phase I, Micromachined Piezoelectric Multi-layer Actuators for Cryogenic Adaptive Optics: Stevens PI, (PI: Xiaoning Jiang, TRS Technologies) (2008~2008) (NASA Contract No. NNX09CA83C)
DARPA TTO, Large Aperture Space Surveillance (Optical) (LASSO) Phase I, BAA04-36: In-space Optics Manufacturing and Precision Deployment for Large Aperture Space Surveillance, Co-PI (PI: John Hong) (2005)
JPL Spontaneous Concepts, Director's Research and Development Fund: Piezoelectric Nanowire Resonator Sensor Arrays for Biochemical Detection, PI (2005~2006)
JPL Research and Technology Development, Cryogenic, Large-Travel, Latching-Type Microactuator for Re-Configurable, Ultra-Large, Ultra-Lightweight Space Telescopes, PI (2004~2006)
National Reconnaissance Office, Director’s Innovation Initiatives, Title: Miniaturized, Lightweight, Latching-Type Inchworm Actuator for Active Shape Correction of Ultra-Large Space Telescope Mirrors, PI (2004~2005)
NASA NRA, Astrobiology Science, and Technology Instrument Development, Bio/Nano Technology Program: Ultra-small Force-Detected Nuclear Magnetic Resonance Spectrometer system for Biological/Astrobiological Investigations, Co-PI (PI: Thomas George) (2004)
Physical Optics Corporation, Fabrication of Membrane Arrays for Differencing Electrostatic Optical Sensors, PI (2004~2005)
JPL Spontaneous Concepts, Research and Technology Development: Inchworm Actuator for Future Ultra-Large Space Telescopes, PI (2004~2004)
National Reconnaissance Office, Title: Vertical Inchworm Microactuator, PI (2003~2004)
NASA Code R Enabling Concepts and Technologies, Integrated Piezoelectric MEMS Microvalve for LCAM, PI (2003~2004)
National Reconnaissance Office, Director’s Innovation Initiatives: Deployment and Shape Control for Configurable Large Aperture Telescopes, PI (2003~2004)
JPL Spontaneous Concepts, Director's Research and Development Fund: Wireless IOP sensor, Co-PI (PI: Wolfgang Fink) (2003~2004)
Caltech President Funding, Wireless IOP sensor, Co-PI (PI: Wolfgang Fink) (2003~2004)
IOCC, Assessment and Preliminary Design of MEMS-actuated Optical Waveguide Device, PI (2003)
JPL Director's Research and Development Fund, Large-Stroke, Large-Area, Continuous Membrane MEMS Deformable Mirror for Ultra-Large, Ultra-Lightweight Telescopes, PI (2002~2005)
NASA Code R Enabling Concepts and Technologies, Integrated Piezoelectric MEMS Microvalve for Microspacecraft Test Bed, PI (2002~2003)
JPL Director's Research and Development Fund, Membrane Transfer Technology for Continuous Membrane Deformable Mirrors, PI (2001~2002)
NSF Center for Adaptive Optics, Development of the Fabrication Process for Deformable Mirrors, PI (2001~2002)
NASA Gossamer Space Telescope Technology NRA, Advanced Segmented Silicon Space Telescope, Co-PI (PI: Richard Dekany) (2001~2002)
Xinetics, Mirror Wafer Transfer Process, PI (2001~2002)
NASA Cross Enterprise Technology Development Program, MEMS Microvalve for Space Applications, PI (2000~2002)
NASA Cross Enterprise Technology Development Program, Thin-film PZT Microactuators, PI (2000~2002)

1. J. Xu, W. Xu, B. Englot, C.-H. Choi, R. Besser and E. H. Yang, “in situ Oil Cleanup and Recovery Using Smart Polymer Integrated Surface Vessels,” US Patent App (published as US2023/0025974-A1)
2. S. Fu, K. Kang and E. H. Yang, “in situ Doping of Metal Atoms into TMDs - 2D Dilute Magnetic Semiconductors at Room Temperature,” International Patent App. (filed on June 4, 2021 as PCT/US2021/036034)
3. R. Zhang, J. Ding and E. H. Yang, “Stretchable Supercapacitors with Vertically-Aligned Embedded Carbon Nanotubes,” US 11,961,669 U.S. Patent
4. R. Zhang and E. H. Yang, “VACNT-based Flexible Electronics for Sensing and Capacitance Applications” US 11,541,648 U.S. Patent
5. X. Wang, K. Kang, S. Chen, G. Hader and E. H. Yang, “Location-Specific Growth and Transfer of Single-Crystalline TMD Monolayer Arrays,” US 10,889,914 U.S. Patent
6. Y. Kim, K. Kumar and F. Fisher, and E. H. Yang, “Popcorn-like Growth of Graphene-Carbon Nanotubes Multi-stack Hybrid for Energy Storage Applications,” US 9,738,526 U.S. Patent
7. K. Kang and E. H. Yang, “Direct and Pre-patterned Synthesis of 2 Dimensional Heterostructures,” US 9,640,391 U.S. Patent
8. V. Patil, Y. Kim, K. Kumar and E. H. Yang, “High-Throughput Graphene Printing and Selective Transfer Using a Localized Laser Heating Technique,” US 9,573,814 US Patent
9. V. Patil, S. Strauf and E. H. Yang, “Active Bandgap Tuning of Materials for Tunable Photodetection Applications,” US 8,878,120 US Patent
10. E. H. Yang, “A PZT Unimorph based, High Stroke MEMS Deformable Mirror with Continuous Membrane and Methods of Making the Same,” US 7,336,412 US Patent
11. E. H. Yang, “Wafer Level Transfer of Membranes with Gas-Phase Etching and Wet Etching Methods,” US 7,268,081 US Patent
12. W. Fink, E. H. Yang, C. Lee, M. Humayun, and G. Y. Fujii, “Optically Powered and Optically Data-Transmitting Wireless Intraocular Pressure Sensor Device,” US 7,131,945 US Patent
13. E. H. Yang and D. Wiberg, “A Wafer-Level Transfer of Membranes in Semiconductor Processing,” US 6,777,312 US Patent
14. Y. -T. Tsai, C.-H. Choi and E. H. Yang, “Marangoni Stress-Driven Droplet Manipulation on Smart Polymers for Ultra-Low Voltage Digital Microfluidics," Patent application number: 13/434082
15. K. Kumar and E. H. Yang, “A High-throughput Local Oxidation Patterning Process,” Patent application number: 12/732518
16. C. P. Search, S. Strauf and E. H. Yang, “Phase Coherent Solid-State Electron Gyroscope Array,” Patent application number: 12/908419

Authored over a hundred journal papers, exceeding two hundred fifty conference papers, contributed to seven book chapters, and published two books. Some notable examples are outlined below:

- S. Fu, K. N. Kang, K. Shayan, A. Yoshimura, S. Dadras, X. Wang, L. H. Zhang, A. Jindal, X. Li, S. Chen, A. Pasupathy, N. Vamivakas, V. Meunier, S. Strauf and E. H. Yang, “Enabling Room Temperature Ferromagnetism in Monolayer MoS₂ via in Situ Iron-Doping,” Nature Communications, 11, 2034 (2020)
- K. Kang, K. Godin, Y. D. Kim, S. Fu, W. Jang, J. Hone and E. H. Yang “Graphene-Assisted Anti-Oxidation of Tungsten Disulfide Monolayers: Substrate and Electric Field Effect,” Advanced Materials, 18, 1603898 (2017) Cover Article
- M. Belgiarbekov, K. Sasaki, O. Sul, E. H. Yang, and S. Strauf, “Optical Control of Edge Chirality in Graphene,” Nano Letters, 11, 4874 (2011)
- M. Belgiarbekov, O. Sul, J. Santanello, N. Ai, X. Zhang, E. H. Yang, and S. Strauf, “Localized States and Resultant Band Bending in Graphene Antidot Superlattices,” Nano Letters, 11(3), 1254 (2011)
- M. A. Aly, M. Shah, L. M. Schneider, M. Koch, K. Kang, E. H. Yang, and A. Rahimi-Iman, “Radiative Pattern of Intralayer and Interlayer Excitons in Two-Dimensional WS2/WSe2 Heterostructures,” Scientific Reports, 12, 6939 (2022) Top 100 downloaded paper
- R. Zhang, J. C. Kim, J. Ding, A. Palumbo, and E. H. Yang, “Flexible Energy Storage using Graphene, Graphene Oxide and Carbon Nanotubes,” Annalen der Physik., 1800507 (2019) Invited Review Article, Top 10% downloaded paper
- R. Zhang, K. Yan, A. Palumbo, J. Xu, S. Fu, and E. H. Yang, “A Stretchable and Bendable All-Solid-State Pseudocapacitor with Dodecylbenzenesulfonate-doped Polypyrrole-Coated Vertically Aligned Carbon Nanotubes Partially Embedded in PDMS,” Nanotechnology, 30, 095401 (2018) Featured Article
- Y. Kim, K. Kumar, F. Fisher and E. H. Yang, “Out-of-Plane Growth of CNTs on Graphene for Supercapacitor Applications,” Nanotechnology, 23, 015301 (2012) Featured in the exclusive ‘Highlight 2012’ collection, Top 10% downloaded paper
- Y. Hishinuma and E. H. Yang, “Piezoelectric Unimorph Microactuator Arrays for Single-Crystal Silicon Continuous Membrane Deformable Mirror,” IEEE/ASME Journal of Microelectromechanical Systems, 15(2), 370 (2006)

NANO 200: Intro to Nanotechnology
ME 483: Control Systems
ME 581: Introduction to Bio Micro Electro Mechanical Systems
NANO 325: Introduction to Nanofabrication and Characterization
NANO 600: Nanoscale Science and Technology
ME 681: Applications of Advanced Micro/Nano Materials, Structures, and Devices